An Analysis on the Blade Design Parameters of Turbo Molecular Pumps

碩士 === 國立中山大學 === 機械工程學系研究所 === 88 === Turbo Molecular pumps, abbreviated as TMP, can create a high vacuum environment for some special industries, especially the semiconductor and IC industries. The turbo blade design is one of the main technologies that affect the performance of a TMP. The object...

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Bibliographic Details
Main Authors: Hong-Zhi Tsai, 蔡鴻志
Other Authors: Y. C. Tsai
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/38855565619379329377