| Summary: | 碩士 === 國立中山大學 === 機械工程學系研究所 === 88 === Turbo Molecular pumps, abbreviated as TMP, can create a high vacuum environment for some special industries, especially the semiconductor and IC industries. The turbo blade design is one of the main technologies that affect the performance of a TMP. The object of this study is to investigate what kind of blade design parameters, e.g. blade angle, blade spacing, blade chord, blade velocity, etc., will affect the performance of TMP. It is hope that an analysis methodology of these parameters can be setup in the viewpoint of pumping rate curve. The results of this study will be useful for the design of TMP.
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