An Analysis on the Blade Design Parameters of Turbo Molecular Pumps
碩士 === 國立中山大學 === 機械工程學系研究所 === 88 === Turbo Molecular pumps, abbreviated as TMP, can create a high vacuum environment for some special industries, especially the semiconductor and IC industries. The turbo blade design is one of the main technologies that affect the performance of a TMP. The object...
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2000
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ndltd-TW-088NSYS54900692016-07-08T04:22:57Z http://ndltd.ncl.edu.tw/handle/38855565619379329377 An Analysis on the Blade Design Parameters of Turbo Molecular Pumps 渦輪分子真空幫浦葉片設計參數分析 Hong-Zhi Tsai 蔡鴻志 碩士 國立中山大學 機械工程學系研究所 88 Turbo Molecular pumps, abbreviated as TMP, can create a high vacuum environment for some special industries, especially the semiconductor and IC industries. The turbo blade design is one of the main technologies that affect the performance of a TMP. The object of this study is to investigate what kind of blade design parameters, e.g. blade angle, blade spacing, blade chord, blade velocity, etc., will affect the performance of TMP. It is hope that an analysis methodology of these parameters can be setup in the viewpoint of pumping rate curve. The results of this study will be useful for the design of TMP. Y. C. Tsai 蔡穎堅 2000 學位論文 ; thesis 75 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
| description |
碩士 === 國立中山大學 === 機械工程學系研究所 === 88 === Turbo Molecular pumps, abbreviated as TMP, can create a high vacuum environment for some special industries, especially the semiconductor and IC industries. The turbo blade design is one of the main technologies that affect the performance of a TMP. The object of this study is to investigate what kind of blade design parameters, e.g. blade angle, blade spacing, blade chord, blade velocity, etc., will affect the performance of TMP. It is hope that an analysis methodology of these parameters can be setup in the viewpoint of pumping rate curve. The results of this study will be useful for the design of TMP.
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| author2 |
Y. C. Tsai |
| author_facet |
Y. C. Tsai Hong-Zhi Tsai 蔡鴻志 |
| author |
Hong-Zhi Tsai 蔡鴻志 |
| spellingShingle |
Hong-Zhi Tsai 蔡鴻志 An Analysis on the Blade Design Parameters of Turbo Molecular Pumps |
| author_sort |
Hong-Zhi Tsai |
| title |
An Analysis on the Blade Design Parameters of Turbo Molecular Pumps |
| title_short |
An Analysis on the Blade Design Parameters of Turbo Molecular Pumps |
| title_full |
An Analysis on the Blade Design Parameters of Turbo Molecular Pumps |
| title_fullStr |
An Analysis on the Blade Design Parameters of Turbo Molecular Pumps |
| title_full_unstemmed |
An Analysis on the Blade Design Parameters of Turbo Molecular Pumps |
| title_sort |
analysis on the blade design parameters of turbo molecular pumps |
| publishDate |
2000 |
| url |
http://ndltd.ncl.edu.tw/handle/38855565619379329377 |
| work_keys_str_mv |
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