An Analysis on the Blade Design Parameters of Turbo Molecular Pumps
碩士 === 國立中山大學 === 機械工程學系研究所 === 88 === Turbo Molecular pumps, abbreviated as TMP, can create a high vacuum environment for some special industries, especially the semiconductor and IC industries. The turbo blade design is one of the main technologies that affect the performance of a TMP. The object...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38855565619379329377 |