Research on Robust Control of Micromachined Accelerometers
碩士 === 國立中山大學 === 機械工程學系研究所 === 88 === This paper presents the research on the robust control of micromachined accelerometers. First, we present different micromaching techniques and compare, analyze the accelerometers with different methods of signal pick-off. Besides the different methods of signa...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/96078555570476119142 |