A Cost-based Heuristic for Statistically Determining Sampling Frequency in Wafer Fab
碩士 === 國立清華大學 === 工業工程與工程管理學系 === 88 === A number of inspection and measurement stations are set in the fabrication process to assure that the quality of wafer meets the specific requirements. Due to the limitation of inspection machine capacities, reducing sampling frequency to save capacity under...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36031751702595018617 |