Synthesis and Characterization of Interface of Heteroepitaxial Diamond Films on Silicon by MPECVD
博士 === 國立清華大學 === 材料科學工程學系 === 88 === Heteroepitaxial growth of diamond films on (001) silicon has been successfully achieved by a three-step process (i.e. carburization, biasing, and growth) in a MPECVD system using the mixture of CH4 diluted in H 2 as the precursor gas. By HRTEM observa...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18261026137866460850 |