The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope

碩士 === 國立清華大學 === 物理學系 === 88 === Abstract In this experiment,we discuss that grain sizes have different effect on C-V curve and P-E curve . The result is that the film of smaller grain size have high capacity and have smoother P-E curve than the flim of greater grain size meas...

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Bibliographic Details
Main Authors:	C.J. Chen, 陳建宇
Other Authors:	Prof. Ya-Chang
Format:	Others
Language:	zh-TW
Published:	2000
Online Access:	http://ndltd.ncl.edu.tw/handle/84371453595924006608

id	ndltd-TW-088NTHU0198050
record_format	oai_dc
spelling	ndltd-TW-088NTHU01980502016-07-08T04:23:16Z http://ndltd.ncl.edu.tw/handle/84371453595924006608 The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope 以原子力顯微鏡對鋯鈦酸鉛薄膜之電性量測 C.J. Chen 陳建宇碩士國立清華大學物理學系 88 Abstract In this experiment,we discuss that grain sizes have different effect on C-V curve and P-E curve . The result is that the film of smaller grain size have high capacity and have smoother P-E curve than the flim of greater grain size measured at different areas . In the local P-E curve , we got different curve at different frequency.When the frequency is 500mHZ, we can see the local P-E curve . If we increase sweep time,the P-E curve will decay at 500mHZ and 5mHZ;how-ever,we can not see the same phenomenon at the frequency 50mHZ. Prof. Ya-Chang Prof. Joseph Ya-Min Lee 周亞謙李雅明 2000 學位論文 ; thesis 74 zh-TW
collection	NDLTD
language	zh-TW
format	Others
sources	NDLTD
description	碩士 === 國立清華大學 === 物理學系 === 88 === Abstract In this experiment,we discuss that grain sizes have different effect on C-V curve and P-E curve . The result is that the film of smaller grain size have high capacity and have smoother P-E curve than the flim of greater grain size measured at different areas . In the local P-E curve , we got different curve at different frequency.When the frequency is 500mHZ, we can see the local P-E curve . If we increase sweep time,the P-E curve will decay at 500mHZ and 5mHZ;how-ever,we can not see the same phenomenon at the frequency 50mHZ.
author2	Prof. Ya-Chang
author_facet	Prof. Ya-Chang C.J. Chen 陳建宇
author	C.J. Chen 陳建宇
spellingShingle	C.J. Chen 陳建宇 The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope
author_sort	C.J. Chen
title	The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope
title_short	The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope
title_full	The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope
title_fullStr	The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope
title_full_unstemmed	The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope
title_sort	electrical characterization of lead zirconate titanate (pzt) thin films using atomic force microscope
publishDate	2000
url	http://ndltd.ncl.edu.tw/handle/84371453595924006608
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The electrical characterization of lead zirconate titanate (PZT) thin films using atomic force microscope

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