Some Preparatory Work for Low Temperature Poly-Si TFT Fabrication .
碩士 === 國立清華大學 === 電子工程研究所 === 88 === In order to fabricate the medical image sensor circuitry , we must fabricate the poly-Si TFT to replace with the a-Si:H TFT . Our group have researched the poly-Si films which were fabricated by ECR-CVD hydrogen dilution method many years . But if we w...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18404427706567089827 |