The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method
碩士 === 國立清華大學 === 電子工程研究所 === 88 === A-Si:H p-i-n photodiodes with scintillators to detect high energy particles including X-ray photons have been studied more than decade. And they were practically integrated with radiography machine as the X-ray sensor. In order to improve diodes'...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25548609193100307732 |