The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method
碩士 === 國立清華大學 === 電子工程研究所 === 88 === A-Si:H p-i-n photodiodes with scintillators to detect high energy particles including X-ray photons have been studied more than decade. And they were practically integrated with radiography machine as the X-ray sensor. In order to improve diodes'...
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ndltd-TW-088NTHU04280432016-07-08T04:23:17Z http://ndltd.ncl.edu.tw/handle/25548609193100307732 The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method 以電子迴旋共振化學氣相沈積氫稀釋法製作矽光偵測器 chi-wei lai 賴志偉 碩士 國立清華大學 電子工程研究所 88 A-Si:H p-i-n photodiodes with scintillators to detect high energy particles including X-ray photons have been studied more than decade. And they were practically integrated with radiography machine as the X-ray sensor. In order to improve diodes' sensitivity and efficiency, we must improve the optical absorption efficiency of a-Si:H p-i-n diodes. So we engaged in improve the efficiency of single p-i-n and tandem cell structure. In our experiments, the growth conditions to prepare the p, i, n layers of solar cells by using ECRCVD was found. We design and fabricate the solar cells include single pin and tandem cell structures. From the results of I-V measurements, the efficiency of single pin structures were 2.85%, 2.145%, 2.88%, and the efficiency of a-Si/ c-Si tandem cell was 3.45%. The efficiency of tandem cell structure was higher than single pin structure. So, the tandem cell structure can be applied for medical imaging system in the future. Huey-Liang Hwang 黃惠良 2000 學位論文 ; thesis 69 zh-TW |
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碩士 === 國立清華大學 === 電子工程研究所 === 88 === A-Si:H p-i-n photodiodes with scintillators to detect high energy particles including X-ray photons have been studied more than decade. And they were practically integrated with radiography machine as the X-ray sensor. In order to improve diodes' sensitivity and efficiency, we must improve the optical absorption efficiency of a-Si:H p-i-n diodes. So we engaged in improve the efficiency of single p-i-n and tandem cell structure.
In our experiments, the growth conditions to prepare the p, i, n layers of solar cells by using ECRCVD was found. We design and fabricate the solar cells include single pin and tandem cell structures. From the results of I-V measurements, the efficiency of single pin structures were 2.85%, 2.145%, 2.88%, and the efficiency of a-Si/ c-Si tandem cell was 3.45%. The efficiency of tandem cell structure was higher than single pin structure. So, the tandem cell structure can be applied for medical imaging system in the future.
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author2 |
Huey-Liang Hwang |
author_facet |
Huey-Liang Hwang chi-wei lai 賴志偉 |
author |
chi-wei lai 賴志偉 |
spellingShingle |
chi-wei lai 賴志偉 The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method |
author_sort |
chi-wei lai |
title |
The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method |
title_short |
The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method |
title_full |
The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method |
title_fullStr |
The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method |
title_full_unstemmed |
The fabrication of novel hydrogenated silicon photodetectors using ECRCVD hydrogen diluted method |
title_sort |
fabrication of novel hydrogenated silicon photodetectors using ecrcvd hydrogen diluted method |
publishDate |
2000 |
url |
http://ndltd.ncl.edu.tw/handle/25548609193100307732 |
work_keys_str_mv |
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