Etching Techniques for the Realization of Semiconductor Devices Based on III-V Nitrides

博士 === 國立清華大學 === 電子工程研究所 === 88 === III-nitrides semiconductors attract numerous attention in the last decade, especially for the optical devices such as blue laser diodes as well as the high frequency, high power and high temperature electronic devices such as high electron mobility transistors (H...

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Bibliographic Details
Main Authors: Hsieh Jyh Tsung, 謝志聰
Other Authors: Hwang Huey Liang
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/43711097626592985315