Preparation and Characterization of Dielectric BaTiO3 films by Sputter Deposition
碩士 === 國立海洋大學 === 材料工程研究所 === 88 === Film deposition, crystography and thermal analyses as well as electrical properties of R.F. sputtered BaTiO3 with various niobium concentrations on glasses and silicon wafer substrates have been studied. Characterizations of film including composition, activation...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08499306373103833658 |