Statistical Analysis and Design for Semiconductor Production System
碩士 === 國立臺灣大學 === 工業工程學研究所 === 88 === Wafer fabrication, one of the key processes in semiconductor manufacturing, is perhaps the most complex manufacturing process. A major process flow in a wafer fabrication factory may contain over 200~300 separate steps or operations. It’s complicated processes (...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32954053864977012200 |