Study and Application of TMAH Anisotropic Wet Etching
碩士 === 國立臺灣大學 === 機械工程學研究所 === 88 === Anisotropic wet etching is one of the key technologies for the microstructure fabrication in Micro Electro Mechanical Systems (MEMS). The most commonly used etchants are potassium hydroxide water solution (KOH), ethylenediamine-pyrocatechol-water (EDP), and hydr...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81718552117093274366 |