The Search of the Optimal Dispatching Rules of Furnace Process to accommodate a Specified Wafer Fabrication Environment by Experiment Design
碩士 === 國立臺灣大學 === 機械工程學研究所 === 88 === In wafer fabrication processes, furnace steps account for over 30% of the overall cycle time. This is caused by long processing times and the batch principle of the furnaces. If the batch size is increased, the throughput of a furnace for one time process is inc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/27105560035483700471 |