Theory of wet etch on crystal
博士 === 國立臺灣大學 === 應用力學研究所 === 88 === ABSTRACT Elements of micro-electronic-mechanical systems such as sensors or actuators often required isotropic or anisotropic etching again silicon wafers in order to produce necessary space of cavity or entity. Etch rate heavily depends on the ori...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98475042853075039462 |