The Fabrication and Investigation of PZT Capacitor
碩士 === 國立臺灣科技大學 === 電子工程系 === 88 === The main subject of thesis is ferroelectric PZT ( Pb1.1ZrxTi1-xO3, x = 0.52 ) thin films to be need as capacitors in nonvolatile memories. The PZT films are deposited by metal-organic-decomposition (MOD). Two kinds of substrates, Pt/Ti/SiO2/Si and Pt/T...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64390716806841354309 |