The Fabrication of Trench Gated Power MOSFET
碩士 === 國立臺灣科技大學 === 電子工程系 === 88 === The trench MOSFET’s are now widely used as the power MOSFET’s. Their on resistances have been steadily reduces by scaling down the cell pitch. However, in the typical process of conventional trench MOSFET,6~7mask layers are needed, including field oxid...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96065107278720248066 |