Digital Shadow Moir''e method for warpage measurement
碩士 === 國立臺灣科技大學 === 機械工程系 === 88 === In this thesis，Shadow Moire technique associated with digital image processing was developed to serve as a non-contact Optical measurement system to determine 8-inch wafer''s warpage. Shadow Moire system''s feature was full field analysis，high...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06024673680260556428 |