An Investigation of Manufacturing Semiconductor Type H2S Sensor by MEMS Technology

碩士 === 中國文化大學 === 材料科學與製造研究所 === 88 === The purpose of this research is to develop a semiconductor type H2S sensor with silicon-based microfabrication and micromaching technology. By using MEMS (Microelectro Mechanical System) related techniques, the sensing area of the device can be made...

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Bibliographic Details
Main Authors: Ching-Hsiang Tsai, 蔡晴翔
Other Authors: Wei-Han Tao
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/56135681461349708990