An Investigation of Manufacturing Semiconductor Type H2S Sensor by MEMS Technology
碩士 === 中國文化大學 === 材料科學與製造研究所 === 88 === The purpose of this research is to develop a semiconductor type H2S sensor with silicon-based microfabrication and micromaching technology. By using MEMS (Microelectro Mechanical System) related techniques, the sensing area of the device can be made...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56135681461349708990 |