The Energy Saving and Operational Characteristics of a Super Clean Room
碩士 === 國立臺北科技大學 === 電機與能源研究所 === 88 === Semiconductor manufacturing industry is not only a technology-intensive but also an energy-intensive industry. According the United States Environment Protection Agency (EPA), the semiconductor industry of USA consumed more than 8 billion kWh in 1996 【13】. Thi...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/22733482736265167292 |