A Study on the Airflow Patterns and Improvement of a Super Clean Room
碩士 === 國立臺北科技大學 === 電機與能源研究所 === 88 === 英文摘要 High technology industries such as LCD and semiconductor manufacturing, have stringent requirements on clean environment. Traditional ball room type clean room cannot meet the requirement in many cases. The new mini-environment type clean...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36375470540574705015 |