Reducing Polishing Force Variation by Using Compliance Tool Holder Mechanism
碩士 === 淡江大學 === 機械工程學系 === 88 === The purpose of this thesis is to investigate the effect of imposing compliance for reducing polishing force variation. A tool compliance holder is designed by the author and is used in the polishing system. This tool holder contains a replaceable spring, so that v...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03809312845535857024 |