THE FABRICATION OF Ta2O5 THIN FILMS ON BYUFFER LAYER/ SI BY RF MAGNETRON SPUTTERING AND ITS APPLICATIONS
碩士 === 大同大學 === 光電工程研究所 === 88 === Tantalum oxide (Ta2O5) has excellent optical and piezoelectric properties, which make it a prime candidate for integrated optics and surface acoustic wave (SAW) applications. In this thesis, we try to set up Ta2O5/MgO/Si and Ta2O5/SiO2/Si structures for application...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48311671274511035891 |