The investigation and analysis of the electrical conduction mechanism for polycrystalline diamond films
碩士 === 國立雲林科技大學 === 電子工程與資訊工程技術研究所 === 88 === The poly-crystalline diamond thin films were deposited on silicon substrate by microwave plasma chemical vapor deposition system (MPCVD) using methane-hydrogen gas mixtures. Prior to deposition the silicon substrates were seeded by photoresist in which 0...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61032085782673655440 |