Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface
碩士 === 國立雲林科技大學 === 機械工程技術研究所 === 88 === A proximity fringe capacitor was used to measure the surface roughness and the shape of silicon-wafer. The proximity fringe capacitor is a high sensitive and high precision sensor that can measure distance up to nanometer scale. The measured data are analyzed...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21509503863842301522 |