Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface
碩士 === 國立雲林科技大學 === 機械工程技術研究所 === 88 === A proximity fringe capacitor was used to measure the surface roughness and the shape of silicon-wafer. The proximity fringe capacitor is a high sensitive and high precision sensor that can measure distance up to nanometer scale. The measured data are analyzed...
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ndltd-TW-088YUNTE4880112016-06-13T04:16:11Z http://ndltd.ncl.edu.tw/handle/21509503863842301522 Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface 晶圓表面性狀之奈米量測 Ta-Yu Huang 黃大猷 碩士 國立雲林科技大學 機械工程技術研究所 88 A proximity fringe capacitor was used to measure the surface roughness and the shape of silicon-wafer. The proximity fringe capacitor is a high sensitive and high precision sensor that can measure distance up to nanometer scale. The measured data are analyzed to get the information of wafer roughness, flatness and warp. The high precision design and calibration of the measurement system is discussed. Mathematical models of the surface roughness, flatness and warp are explained. Measuring results are displayed graphically. Furthermore, the principle of the measurement of the fringe capacitor is discussed in detail. Dau-Chung Wang 汪島軍 2000 學位論文 ; thesis 120 zh-TW |
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碩士 === 國立雲林科技大學 === 機械工程技術研究所 === 88 === A proximity fringe capacitor was used to measure the surface roughness and the shape of silicon-wafer. The proximity fringe capacitor is a high sensitive and high precision sensor that can measure distance up to nanometer scale. The measured data are analyzed to get the information of wafer roughness, flatness and warp. The high precision design and calibration of the measurement system is discussed. Mathematical models of the surface roughness, flatness and warp are explained. Measuring results are displayed graphically. Furthermore, the principle of the measurement of the fringe capacitor is discussed in detail.
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Dau-Chung Wang |
author_facet |
Dau-Chung Wang Ta-Yu Huang 黃大猷 |
author |
Ta-Yu Huang 黃大猷 |
spellingShingle |
Ta-Yu Huang 黃大猷 Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface |
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Ta-Yu Huang |
title |
Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface |
title_short |
Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface |
title_full |
Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface |
title_fullStr |
Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface |
title_full_unstemmed |
Nano-Scale Measurement Roughness and its Shape of Silicon-Wafer Surface |
title_sort |
nano-scale measurement roughness and its shape of silicon-wafer surface |
publishDate |
2000 |
url |
http://ndltd.ncl.edu.tw/handle/21509503863842301522 |
work_keys_str_mv |
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