以電場感應效應在矽基板上製作奈米線條研究
碩士 === 國立中正大學 === 物理系 === 89 === Abstract Following the principle of Scanning Tunneling Microscopy，a Si3N4 tip coated with 35nm Ti metal to by E-gun evaporate system became conducting and was used to fabricate nano-scale patterns on Si(100) surface。 In experi...
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| Format: | Others |
| Language: | zh-TW |
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2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/88927806817037831256 |