Analysis of the Airborne Contaminants in the Fab of a Semiconductor
碩士 === 長庚大學 === 化學工程研究所 === 89 === Abstract As the airborne molecular contaminants in the clean room play a crucial role associated with the device yield and its functionality, the Semiconductor Industry Association has stressed the importance of cleanness for semiconductor fabrication...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/42076865324431830050 |