The process of high quality Low-temperature poly-Si TFT

碩士 === 長庚大學 === 半導體研究所 === 89 === The color liquid crystal display industry is rapid growth in recent years. Most of the market is covered by AM-LCD using amorphous silicon TFT (a-Si TFT) as a switch device for each pixel. The mobility of a-Si TFT, which is 0.5 ~ 1.0 cm2/Vs, drives each p...

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Bibliographic Details
Main Authors: CHE-HAO LIAO, 廖哲浩
Other Authors: M.C.Wang
Format: Others
Language:en_US
Published: 2001
Online Access:http://ndltd.ncl.edu.tw/handle/01298374720141929378