Fabrication and Magnetic Study of FePt Thin Films
碩士 === 逢甲大學 === 材料科學學系 === 89 === Abstract We deposited FePt thin films by high vacuum RF sputtering system. The film thickness is 200 nm. Heat treatment was done by heating the substrate during depositing process and keep the same temperature for 10 minutes after sputtering. The composi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32051443270368928890 |