Synthesis and Characterization of Metal-Containing and Hydrogenated Diamond-Like Carbon Films Deposited by Unbalanced Magnetron Sputtering Process
博士 === 國立中興大學 === 材料工程學研究所 === 89 === The research purpose was to develop a new process and improve adhesion of diamond-like carbon films. In this study, an amorphous hydrogenated diamond-like carbon coating containing a small amount of titanium, and exhibiting high hardness, low friction coefficie...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90361038323078341045 |