以準分子雷射拖拉法製作3D微結構之研究
碩士 === 國立中興大學 === 機械工程學系 === 89 === Abstract This thesis investigates the fabrication processes of the three-dimensional microstructure by using excimer laser dragging method. The main goal is to develop a systematic process to precisely fabricate a non-spherical micro lens array....
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| Format: | Others |
| Language: | zh-TW |
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2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65798219393624241103 |