以準分子雷射拖拉法製作3D微結構之研究

• Main Author: 程偉倫
• Other Authors: 王國禎
• Format: Others
• Language: zh-TW
• Published: 2001
• Online Access: http://ndltd.ncl.edu.tw/handle/65798219393624241103

碩士 === 國立中興大學 === 機械工程學系 === 89 === Abstract This thesis investigates the fabrication processes of the three-dimensional microstructure by using excimer laser dragging method. The main goal is to develop a systematic process to precisely fabricate a non-spherical micro lens array. The contents of this research can be divided into two parts, experiments and simulation software developing. Relationships between the quality of the final products and the control parameters are analyzed by using the experimental data. The experimental data is then further adopted to formulate both linear and nonlinear process models by linear regression and neural network techniques, respectively. In our excimer laser dragging experiments, only the polycarbonate (PC) substrate is studied. The polycarbonate based micro lens array manufactured by excimer laser power can be smoothed by further reflowing processes.