Nano-positioning Control of a Dual-stage and Long-range System
碩士 === 國立中興大學 === 機械工程學系 === 89 === In this thesis, precision micro-stages with nanometer accuracy with two different structures were studied. The first one was a dual-stage system, which was composed by a coarse-stage with micrometer accuracy, and a fine-stage with nanometer accuracy. The other was...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/85994023293780128379 |