| Summary: | 碩士 === 國立中興大學 === 機械工程學系 === 89 === In this thesis, precision micro-stages with nanometer accuracy with two different structures were studied. The first one was a dual-stage system, which was composed by a coarse-stage with micrometer accuracy, and a fine-stage with nanometer accuracy. The other was a single stage with lever mechanism to achieve long travel range requirement and had three degree of freedom (x, y,θz).
This research was focusing on the real-time closed-loop feedback control strategy. In which, laser interferometer, due to its high resolution and traceability, was used as positioning sensor, and I-control and fuzzy were used for the system control. The experiment results and comparison between these two control methods were discussed in related chapters.
From the experiment results, it shown that the dual-stages system has achieved 2mm travel range with positioning error less than 0.6 nm(rms) in stepping test, and 6nm(rms) in tracking test. While, the single stage has travel range of 280μm×320μm with positioning errors less than 5nm(rms) in X and Y axes, and rotational error less than 1.5×10-7rad (rms). And in tracking test, the positioning errors were less than 4.5nm(rms) in both axes and rotational error was less than 1.2×10-7rad (rms).
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