Investigation of the Surface Acoustic Wave in deposition Zinc Oxide thin film onto Diamond like carbon coated on the Si substrate
碩士 === 國立成功大學 === 材料科學及工程學系 === 89 === The application of surface acoustic wave filter device is aiming directly at piezoelectric thin film with deposited onto diamond like carbon coated on Si substrate from target ZnO in this study. The thin film with constant substrate temperature is ch...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59419812835152620231 |