Characteristics of Bias-enhanced Nucleation for Diamond Thin Films
博士 === 國立成功大學 === 材料科學及工程學系 === 89 === Diamond films were prepared by a microwave plasma chemical vapor deposition in a silica glass tube reaction chamber with a 2.45 GHz microwave generator. The substrates used were p-type (100) oriented single-crystal Si wafer of 1 cm in diameter. The s...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50227469215395485502 |