Thin Film Diaphragm Deformation of a Micro-Pressure Sensor
碩士 === 國立成功大學 === 航空太空工程學系 === 89 === This thesis is discussing thin film diaphragm deformation problems during the fabricating process that when using surface micromachining method to fabricate micro-pressure sensors and proffers some solving methods. Because the design principle of micro-pressure...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28788163383902890235 |