Excimer Laser and Miniature Acoustic Sensors: Fabrication, Evaluation and Applications
碩士 === 國立成功大學 === 機械工程學系 === 89 === Abstract The first objective of this thesis is to investigate the feasibility of using excimer laser micro-machining technique to fabricate small conical piezoelectric elements, and then to construct a miniature NBS conical transducer for acoustic emiss...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69654148523556917490 |