Using Supervised Artificial Neural Networks for Die Defect Detection

碩士 === 國立交通大學 === 工業工程與管理系 === 89 === Defects commonly occur on the surface of a wafer during production owing to carelessness of the operator, poor quality of equipment and inadequate environment. Such defects negatively impact subsequent operations. To maintain the die quality, factorie...

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Bibliographic Details
Main Authors: Ke, Chir-mour, 柯岐謀
Other Authors: Su, Chao-Ton
Format: Others
Language:zh-TW
Published: 2001
Online Access:http://ndltd.ncl.edu.tw/handle/01118440805673560946