Growth of diamond film on CoSi2 substrates by microwave plasma enhanced chemical vapor deposition method

碩士 === 國立交通大學 === 材料科學與工程系 === 89 === Diamond has many excellent material properties. It has the great potential to be extensively used in electronics, photo-electronics, optics and mechanical applications. The applications in electronics, photo-electronics and optics areas demand high-quality orien...

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Bibliographic Details
Main Authors: Mao-Rong Chen, 陳懋榮
Other Authors: Li Chang
Format: Others
Language:zh-TW
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/36m8v7