Effects of Si source, catalysts and chemical pretreatment on deposition and properties of SiCN films
碩士 === 國立交通大學 === 材料科學與工程系 === 89 === The thesis followed the previous SiCN research in this laboratory on effect of additional Si source. Effects of simultaneously adding additional Si source and catalyst, and chemical etching pretreatment on SiCN deposition and properties were studied....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/76358341444725750708 |