Processing Development and Ferroelectric Properties of PZT Thin-Film Piezoelectric Micro-actuator
碩士 === 國立交通大學 === 材料科學與工程系 === 89 === The superior piezoelectric properties of ferroelectric materials make it suitable for micro-actuators applications. In this work, sol-gel process was used to deposit the PZT film on a 4” Si wafer by multiple spin-coating. By using micromaching technology, the fa...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69746336768936622218 |