A Study of Electrical Properties of Tantalum Oxide Films Prepared by Anodic Oxidation
碩士 === 國立交通大學 === 材料科學與工程系 === 89 === Tantalum films were deposited on glass substrates by D.C. sputtering method and then were anodized to form tantalum oxide. Effects of anodizing voltages, and currents were evaluated during the anodizing processes. The oxide films were annea...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63080416211222091265 |