Study of Low-Temperature SPC/Laser Polycrystalline Silicon Films and It's application of Thin Film Transistors
碩士 === 國立交通大學 === 電子工程系 === 89 === In this thesis, excimer laser (KrF) processes are introduced to improve the performance of TFTs. The laser crystallized poly-Si TFTs have larger grain size but rougher surface which yield more variations on device characteristics, comparing to SPC poly-S...
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| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/72547399756154169732 |