The Study of Thin SiO2 Grown in O3 Water
碩士 === 國立交通大學 === 電子工程系 === 89 === There are two parts in the thesis. In the first part, we use the high oxidizing potential of ozonated DI-water to grow a thin chemical oxide layer. The factors including the concentration, temperature and immersion time were controlled to find the relati...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/26282425159065692407 |