Parameters study in ICP-RIE and Fabrication of Sealed Micro-Channels
碩士 === 國立交通大學 === 機械工程系 === 89 === Two subjects are performed in this paper. First, systematical experiments are designed to study the fabrication parameters in Advanced Silicon Etch (ASE) process. Second, an improved fabrication process of sealed micro-channel is carried out with the STS...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61973838984749082007 |