Design output structure of the electrostatic micro motor by UV-LIGA fabrication and electroplate technology
碩士 === 國立交通大學 === 機械工程系 === 89 === The purpose of this research is to use the UV-LIGA fabrication and electroplate technology, which were already developed by our laboratory as the basis, and use the electrostatic micro motor as the framework to make a special design of the rotor geometry structure...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2001
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07534660424440452477 |